Birefringence Induced by the Spatial Dispersion in Deep UV Lithography : Theory and Advanced Compensation Strategy
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概要
- 論文の詳細を見る
- 2005-03-01
著者
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Bociort Florian
Optics Research Group Delft University Of Technology
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SEREBRIAKOV Alexander
Optics Research Group, Delft University of Technology
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MAKSIMOV Evgenii
P. N. Lebedev Physical Institute
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BRAAT Joseph
Optics Research Group, Delft University of Technology
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Braat Joseph
Optics Research Group Delft University Of Technology
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Serebriakov Alexander
Optics Research Group Delft University Of Technology