La_<1-x>Ca_xMnO_<3-δ>薄膜の抵抗温度特性に関する研究
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概要
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Polycrystalline La<SUB>1-x</SUB>Ca<SUB>x</SUB>MnO<SUB>3-δ</SUB> thin film was formed on a Si substrate coated with SiO<SUB>2</SUB> by rf-sputtering in a 100% oxygen atmosphere. A sintered target with almost the same composition as the objective film was used for sputtering. In this study, we analyzed the deposited films composition, crystallization, specific resistance and temperature coefficient of resistance at room temperature. Results show that the films composition could be controlled by the target component : when the substrate temperature was high, it was possible to obtain a film with superior crystallization and lower specific resistance. Results also indicate that the temperature coefficient of resistance was influenced little by the substrate temperature.
- 日本真空協会の論文
- 2004-07-20
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