Modeling of Silicon Vapor Phase Epitaxy Using Stefan-Maxwell Formalism
スポンサーリンク
概要
- 論文の詳細を見る
- Japan Institute of Metalsの論文
- 2004-07-20
著者
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Rajagopal Ramanujam
Department Of Materials Science And Engineering Roberts Hall Box 352120 University Of Washington
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RAO Yalamanchili
Department of Materials Science and Engineering, Roberts Hall, Box 352120 University of Washington
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Rao Yalamanchili
Department Of Materials Science And Engineering Roberts Hall Box 352120 University Of Washington