Quantitative TEM of point defects in Si
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概要
- 論文の詳細を見る
- Published for the Japanese Society of Electron Microscopy by Oxford University Pressの論文
- 2000-04-01
著者
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Gossmann H.-j.
Bell Labs Lucent Technologies
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EAGLESHAM D.
Bell Labs, Lucent Technologies
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VENEZIA V.
Bell Labs, Lucent Technologies
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AGARWAL A.
Semiconductor Equipment Operation, Eaton Corporation
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Venezia V.
Bell Labs Lucent Technologies
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Eaglesham D.
Bell Labs Lucent Technologies
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Agarwal A.
Semiconductor Equipment Operation Eaton Corporation
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Eaglesham D.J.
Bell Labs, Lucent Technologies
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Venezia V.C.
Bell Labs, Lucent Technologies