Dissociation Rate Measurements for Selectivity Evaluation in SF_6 Selective Dissociation by Multiline vs. Single Line CO_2 Laser

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概要

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• The selective dissociation rates of SF6 species, due to both multiline and tuned CO2 laser, have been measured to investigate that the former leads to better selectivity.

• 一般社団法人 日本原子力学会の論文
• 2004-07-25

著者

• Parvin Parviz

  Physic Department Amirkabir University

• SAJAD Batool

  Physic Department, Amirkabir University

• SILAKHORI Kaveh

  Laser Research Center, Atomic Energy Organization of Iran

• ZAMANIPOUR Zahra

  Laser Research Center, Atomic Energy Organization of Iran

• HOOSHVAR Mani

  Physic Department, Amirkabir University

• Sajad Batool

  Physic Department Amirkabir University

• Hooshvar Mani

  Physic Department Amirkabir University

• Silakhori Kaveh

  Laser Research Center Atomic Energy Organization Of Iran

• Zamanipour Zahra

  Laser Research Center Atomic Energy Organization Of Iran

• Parvin Palviz

  Physic Department, Amirkabir University

関連論文

• Dissociation Rate Measurements for Selectivity Evaluation in SF_6 Selective Dissociation by Multiline vs. Single Line CO_2 Laser
• Fluorine Penetration into Amorphous SiO2 Glass at SF6 Atmosphere Using Q-Switched Nd:YAG and Excimer Laser Irradiations

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