Evaporation of Phosphorus in Molten Silicon by an Electron Beam Irradiation Method

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概要

• 論文の詳細を見る
• Japan Institute of Metalsの論文
• 2004-03-20

著者

• Kato Yoshiei

  Steel Research Laboratory Jfe Steel Corporation

• Hanazawa Kazuhiro

  Steel Research Laboratory Jfe Steel Corporation

• YUGE Noriyoshi

  Steel Research Laboratory, JFE Steel Corporation

• Yuge Noriyoshi

  Steel Research Laboratory Jfe Steel Corporation

関連論文

• Boron Removal in Molten Silicon by a Steam-Added Plasma Melting Method
• Removal of Metal Impurities in Molten Silicon by Directional Solidification with Electron Beam Heating
• Evaporation of Phosphorus in Molten Silicon by an Electron Beam Irradiation Method

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