Impact of Ti Deposition and Subsequent RTA Process in Contact Resistivity Characteristics of W-Bit Line in Sub-Micron Dynamic Random Access Memory
スポンサーリンク
概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-11-15
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics | 論文
- Modeling and Characterization of Piezoelectric Fibers with Metal Core
- New advanced fabrication technique for millimeter-wave planar components based on fluororesin substrates using graft polymerization
- Novel Characteristics of Multifunctional Fluid Filters Fabricated by High-Energy Synchrotron Radiation Lithography
- A New Micro-Chemical Reactor Using Fluid Filters for Vertical Fluid Flow Operation
- Construction of Neoclassical Transport Database for Large Helical Device Plasma Applying Neural Network Method