Ni-B Electroless Plating as Cap Layer for Ag Multi-Level Metallization
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概要
- 論文の詳細を見る
- Japan Institute of Metalsの論文
- 2002-07-01
著者
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TSUJIMURA Manabu
Precision Machinery Company, Ebara Corporation
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Ota Masahiro
Tokyo Metropolitan University
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INOUE Hiroaki
Precision Machinery Group, EBARA CORPORATION
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EZAWA Hirokazu
Process & Manufacturing Engineering Center, TOSHIBA CORPORATION
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MIYATA Masahiro
Process & Manufacturing Engineering Center, TOSHIBA CORPORATION
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Ezawa Hirokazu
Process & Manufacturing Engineering Center Toshiba Corporation
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Tsujimura Manabu
Precision Machinery Company Ebara Corporation
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Tsujimura Manabu
Precision Machinery Group Ebara Corporation
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Inoue Hiroaki
Precision Machinery Group Ebara Corporation
関連論文
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- Ni-B Electroless Plating as Cap Layer for Ag Multi-Level Metallization
- Experimental Study on a Stirling Cycle Machine of 100W Design Capacity