Application of High-pressure Annealing Process to Dual Damascene Copper Interconnections

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概要

• 論文の詳細を見る
• Japan Institute of Metalsの論文
• 2002-07-01

著者

• Yoshikawa Tetsuya

  Machinery Company Kobe Steel Ltd.

• Yoshikawa Tetsuya

  Machinery Campany Kobe Steel Ltd.

• Onishi Takashi

  Materials Research Laboratory Kobe Steel Ltd.

関連論文

• Hydrothermal Reaction of Copper and Water
• Calculations of Internal Oxidation Rate Equations and Boundary Conditions between Internal and External Oxidation in Silicon Containing Steels
• Physical Properties of Iron-Oxide Scales on Si-Containing Steels at High Temperature
• Application of High-pressure Annealing Process to Dual Damascene Copper Interconnections
• Effect of Hydrogen on Vacancy Formation in Sputtered Cu Films Studied by Positron Annihilation Spectroscopy
• Hydrothermal Reaction of Copper and Water
• Hydrogen Promoted Copper Migration in the High Pressure Anneal Process
• Effect of Hydrogen on Vacancy Formation in Sputtered Cu Films Studied by Positron Annihilation Spectroscopy

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