クラスタ構造を持つ半導体製造装置向けの柔軟性の高い制御システムCTCSS (Cluster Tool Controller Software System)

概要

論文の詳細を見る
The semiconductor manufacturing industry has continued drastic growth with frequent change of the process technology. The control system for the SPE (Semiconductor Processing Equipment) requires flexibility for the change of the process equipment and prompt installation. We have developed the CTCSS (Cluster Tool Controller Software System) that could realize flexible restructure of the system by the mediation function between the cluster tool controller (CTC) and distributed lower level process module controllers (PMC). In the framework of CTCSS it is possible for existing CTC to reconstruct control system without detailed information of PMC. It has proved that by the methodology of CTCSS we can make the flexible control system for SPE and delivery could be made half.
社団法人電気学会の論文
2004-02-01