大気圧グローの応用 : 表面改質装置 "Aiplasma" の実用化事例
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概要
- 論文の詳細を見る
We have developed and marketed a unique plasma processing unit named Aiplasma. which operates under atmospheric pressure, allowing the configuration of continuous processing lines suitable for mass production. In this unit, high density plasma is generated inside a vessel and active plasma species are emitted outside the vessel to make downstream plasma treatment. It has various potentials for modifying material surface such as increasing wettability, removing of organic contaminants to enhance bondability, and improving the adhesion strength of organic materials. Aiplasma has been used in many actual processes such as the production of LCD modules, electric components, and printed circuit boards. This report describes the process technology and its practical applications.
- プラズマ・核融合学会の論文
- 2003-10-25