Standing Microcoil Actuator Array

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概要

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• A standing microcoil actuator array fabricated for driving three-dimensional out-of-plane structures is proposed. Since the microcoil structures have a magnetic thin-film layer, they can be erected on the substrate when a vertical magnetic field is applied to them. Additionally they can be actuated when a current is applied to the coil structure. In this paper, we have demonstrated the driving of a microslit on the standing microcoil actuator array. It could achieve parallel motion to the substrate at the frequency from DC to 1 kHz.

• 公益社団法人 応用物理学会の論文
• 2003-06-15

著者

• Shimoyama Isao

  Department Of Mechano-infomatics Graduate School Of Information Science And Technology The Universit

• TAKEUCHI Shoji

  Center for International Research on Micro Mechatoronics, Institute of Industrial Science, The University of Tokyo

• Takeuchi Shoji

  Center for International Research on Micromechatronics (CIRMM), Institute of Industrial Science (IIS), The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan

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• Standing Microcoil Actuator Array
• Standing Microcoil Actuator Array

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