Pumping Characteristics of Bakeable Cryopumps without Charcoal in the Range of Extremely High Vacuum
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概要
- 論文の詳細を見る
- 1994-09-20
著者
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Matsui Yutaka
Ulvac Japan Ltd. Res. And Dev. Division
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OHZORA Hiroki
ULVAC JAPAN Ltd., Res. and Dev. Division
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XU Minsheng
ULVAC JAPAN Ltd., Res. and Dev. Division
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Ohzora Hiroki
Ulvac Japan Ltd. Res. And Dev. Division
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Xu Minsheng
Ulvac Japan Ltd. Res. And Dev. Division
関連論文
- Pumping Characteristics of Bakeable Cryopumps without Charcoal in the Range of Extremely High Vacuum
- Attainment of Extremely High Vacuum Using Copper Ultrafine Powder as Cryosorbent in Bakeable-Type Cryopump
- Summary Abstract