Characteristics of a Titanium Chamber for XHV

概要

論文の詳細を見る
Titanium is a promising candidate material for vacuum chambers for UHV (ultra high vacuum) and XHV (extreme high vacuum) applications. It has such advantages as light weight, high corrosion resistivity and great mechanical strength. We have studied the outgassing rates of small samples of stainless steel and titanium after various surface treatments. Titanium was found to have a lower outgassing rate, and the surface treatment of coating TiN is effective to reduce the outgassing rate. Taking these advantages into consideration, we configured a vacuum chamber made of TiN-coated titanium and obtained an ultimate pressure of 5.8×10<SUP>-11</SUP> Pa in XHV region. Mass analyses of gases from small samples were studied and discussed.
日本真空協会の論文
1994-09-20