Transporting Specimens into Extremely High Vacuum from Atmospheric Pressure

概要

論文の詳細を見る
Specimen transportation into extremely high vacuum was investigated using a system consisting of three chambers manufactured from type 304 stainless steel. The main chamber was evacuated with a turbomolecular pump and a titanium sublimation pump with a shroud at room temperature. Transport from the entry chamber at atmospheric pressure to the main chamber at 7×10-10 Pa through a preparation chamber at 2×10-8 Pa took four hours. Pressure recovery after transport took 30 minutes in the 10-10 Pa range. Residual gas analysis showed that this recovery time might be attributed to slow desorption of the water adsorbed on the main chamber surface during transport. On the other hand, the hydrogen, methane, carbon monoxide and carbon dioxide pressures reached the background level within a few minutes after transport was completed. It was also found that as much methane and carbon oxides as hydrogen were released from the equipment during transport.
日本真空協会の論文
1994-09-20