Characterising the Radio Frequency Plasma Source for Glow Discharge Optical Emission Spectroscopy
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概要
- 論文の詳細を見る
- 2002-03-01
著者
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Guillot Philippe
Cpat
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Chapon Patrick
Jobin-yvon Emission Horiba Group
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PAYLING Richard
Department of Physics, University of Newcastle
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BONNOT Olivier
Jobin-Yvon Emission Horiba Group
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BELENGUER Philippe
CPAT
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PITCHFORD Leanne
CPAT
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THERESE Laurent
CPAT
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MICHLER Johann
Swiss Federal Laboratories for Materials Testing and Research (EMPA)
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AEBERHARD Max
Swiss Federal Laboratories for Materials Testing and Research (EMPA)
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Payling Richard
Department Of Physics University Of Newcastle