Thermoelectric Infrared Sensors with High Responsivity for Automotive Applications

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概要

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• This paper presents the structure and fabrication process of a thermoelectric infrared sensor that provides high responsivity and a low cost potential. The processes for obtaining a precisely patterned Au-black infrared absorbing layer and reducing the internal stress of the Si3N4 layer deposited by LP-CVD achieve both high responsivity and an excellent time constant. A prototype sensor, having external dimensions of 160μm×160μm and six pairs of thermopiles, achieved responsivity of 2100V/W and a time constant of 25msec at a pressure of 7.33Pa. This Performance is suitable for automotive applications.

• 社団法人 電気学会の論文
• 2001-06-01

著者

• Hirota Masaki

  Nissan Motor

• Morita Shinichi

  Nissan Motor

• SATOU Fuminori

  Nissan Motor

関連論文

• Thermoelectric Infrared Sensors with High Responsivity for Automotive Applications

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