Numerical Techniques on Enhancing Robustness for Stress-Dependent Oxidation Simulation Using Finite Element Method in SUPREM-IV

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概要

• 論文の詳細を見る
• 1992-02-25

著者

• Dutton Robert

  Integrated Circuits Laboratory Stanford University

• Oda Yoshinori

  Integrated Circuits Laboratory Stanford University

• YU Kaung-shia

  Mission College Blvd.

• TUNG Thye-lai

  Mission College Blvd.

• RAEFSKY Arthur

  Integrated Circuits Laboratory, Stanford University

• SCHARFETTER Donald

  Mission College Blvd.

• Raefsky Arthur

  Integrated Circuits Laboratory Stanford University

関連論文

• Numerical Techniques on Enhancing Robustness for Stress-Dependent Oxidation Simulation Using Finite Element Method in SUPREM-IV

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