Preparation of Ultra thin SrBi_2Ta_2O_9 Films Using Metalorganic Chemical Vapor Deposition Combined with a Modified Annealing Method

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概要

• 論文の詳細を見る
• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 2001-02-01

著者

• Moon Bum-ki

  Core Technology Development Center Sony Corporation

• Hironaka Katsuyuki

  Core Technology Development Center Sony Corporation

• ISOBE Chiharu

  Core Technology Development Center, Sony Corporation

• HISHIKAWA Shinichi

  Core Technology Development Center, Sony Corporation

• Hishikawa Shinichi

  Core Technology Development Center Sony Corporation

• Isobe Chiharu

  Core Technology Development Center Sony Corporation

関連論文

• Preparation of Ultra thin SrBi_2Ta_2O_9 Films Using Metalorganic Chemical Vapor Deposition Combined with a Modified Annealing Method
• Preparation of Ultra thin SrBi2Ta2O9 Films Using Metalorganic Chemical Vapor Deposition Combined with a Modified Annealing Method

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