Kinetics of SiHCl_3 and SiCl_4 Evolution in Si(g) System simulated
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概要
- 論文の詳細を見る
- Japan Institute of Metalsの論文
- 2000-03-20
著者
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Saito Nagahiro
Dept. Of Material Science And Engineering School Of Science And Engineering University.
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Ishizaki Takahiro
Dept. Of Material Science And Engineering School Of Science And Engineering University.
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FUWA Akio
Dept. of Material Science and Engineering, School of Science and Engineering, University.
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Fuwa A
Waseda Univ. Tokyo Jpn
関連論文
- Kinetics of SiHCl_3 and SiCl_4 Evolution in Si(g) System simulated
- The Effect of Citric Acid and EDTA Addition on Cu-In Alloy Electrochemical Deposition