Sticking Prevention of Resonant Strain Sensors

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概要

• 論文の詳細を見る

• Sticking is a fundamental phenomenon on micromachined devices or tructures. This paper describes about a practical and successful method of prevention for micromachined resonators from sticking and estimation of its sticking resistance based on experimental data.

• 社団法人 電気学会の論文
• 2000-05-01

著者

• Watanabe Tetsuya

  Department of Cardiology, Knasai Rosai Hospital

• Kudoh T

  Univ. Western Ontario Ontario Can

• IKEDA Kyoichi

  Micromachine Laboratory Yokogawa Electric Corporation

• Watanabe Tetsuya

  Department Of Mechanical Systems Engineering Tokyo University Of Agricultrue And Technology

• Yoshida Takashi

  Tokyo University of Agriculture and Technology

• MIYAZAKI Shun-ichi

  Tokyo University of Agriculture and Technology

• TSUKAMOTO Hideo

  Tokyo University of Agriculture and Technology

• KUDOH Takahiro

  Tokyo University of Agriculture and Technology

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