High Voltage and High Resolution Surface Potential Imaging using Scanning Electrostatic Force Microscope (特集:特殊イメ-ジング技術)

概要

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A newly developed technique for high voltage surface potential imaging having high resolution capability using Scanning Electrostatic Force Microscope(SEFM) is described. It can measure both electrostatic surface potential distribution of several hundred volts on the dielectric film and topography independently and simultaneously in high resolution of some tens of μm, in the air, quantitatively and without affecting charge distribution. The result of measuring surface potential distribution formed by spark discharge on a dielectric film is shown and compared to the results by a conventional electrostatic voltmeter and by toner method.
社団法人電気学会の論文
1997-12-01