片側ダンピング式集積形加速度センサ
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概要
- 論文の詳細を見る
In this paper, damping characteristics of piezoresistive integrated silicon accelerometers, in which a micromachined seismic mass is suspended by four narrow beams from the surrounding frame that incorporates peripheral circuitry and squeeze film damping effect is provided by a single-side air gap under the seismic mass, were analyzed and numerically calculated. The output waveforms for applied sinusoidal accelerations are different from those of accelerometers with symmetrical air-gap structure when subject to large accelerations. The calculated results are compared with measured characteristics of the fabricated devices.
- 社団法人 電気学会の論文
著者
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Muro Hideo
Nissan Motor Co. Ltd.
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Uchikoshi S.
Nissan Motor Co. Ltd.
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Himeno R.
Nissan Motor Co. Ltd.
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Muro H.
Nissan Motor Co. Ltd.
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KIYOTA S.
Nissan Motor Co., Ltd.
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Kiyota S.
Nissan Motor Co. Ltd.
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Uchikoshi Susumu
Nissan Motor Co., Ltd.
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Kiyota Shigeyuki
Nissan Motor Co., Ltd.
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- 片側ダンピング式集積形加速度センサ