Application of a Bias-Current Modulation Technique to Radio-Frequency Glow Discharge Optical Emission Spectrometry
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概要
- 論文の詳細を見る
- 日本分析化学会の論文
- 1999-06-10
著者
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Matsuta Hideyuki
The Institute For Materials Research Tohoku University
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WAGATSUMA Kazuaki
The Institute for Materials Research, Tohoku University
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Wagatsuma Kazuaki
The Institute For Materials Research Tohoku University
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Watanabe Kazuaki
The Institute for Materials Research, Tohoku University
関連論文
- Application of a Bias-Current Modulation Technique to Radio-Frequency Glow Discharge Optical Emission Spectrometry
- Effect of the Driving Frequency on the Emission Characteristics of a Radio-frequency Glow Discharge Excitation Source Boosted by the Introduction of a D. C. Bias Current