Numerical Prediction of the Etched Profile in Pyrolytic Laser Etching of Silicon and Gallium Arsenide
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-08-15
著者
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Chim Wai-kin
Center For Integrated Circuit Failure Analysis And Reliability Faculty Of Engineering National Unive
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WEE Teng-Soon
Center for Integrated Circuit Failure Analysis and Reliability, Faculty of Engineering, National Uni
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LU Yong-Feng
Center for Integrated Circuit Failure Analysis and Reliability, Faculty of Engineering, National Uni
関連論文
- Numerical Prediction of the Etched Profile in Pyrolytic Laser Etching of Silicon and Gallium Arsenide
- Numerical Prediction of the Etched Profile in Pyrolytic Laser Etching of Silicon and Gallium Arsenide