Linear Motion Microsystem Fabricated on a Silicon Wafer

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概要

• 論文の詳細を見る
• 1999-06-30

著者

• Moronuki Nobuyuki

  Graduate School Of Engineering Tokyo Metropolitan University

関連論文

• Surface Properties of SiC Layer Grown by Molecular Beam Epitaxy (MBE) with Helicon Sputtering Molecular Beam Source(Advanced Manufacturing Technology)
• Design of Silicon-Monolithic Flexure Stage with Selective Compliance
• Linear Motion Microsystem Fabricated on a Silicon Wafer

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