Scaling Analysis of Microroughness Structure on Polished Zerodur with Atomic Force Microscope
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概要
- 論文の詳細を見る
- 1996-09-01
著者
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YU J.
Department of optics equipments and engineering, Suzou University
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Takehara H.
Department Of Mechanical Engineering Chubu University
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Namba Y.
Department Of Mechanical Engineering Chubu University
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- Scaling Analysis of Microroughness Structure on Polished Zerodur with Atomic Force Microscope
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