Optical and Electric Properties of Ti_<1-x>Al_xN Thin Films
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概要
- 論文の詳細を見る
- 1997-10-01
著者
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Lin G.
Dept. Of Solid State Electronics Huazhong Univ. Of Sci. & Tech.
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Lee Z.
Dept. Of Electronic Sci And Tech Huazhong University Of Sci. And Tech.
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Xiong R.
Dept. Of Electronic Sci And Tech Huazhong University Of Sci. And Tech.
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XU Y.
Dept. of Production Sys. Eng., Toyohashi Univ. of Tech.
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LU Z.
Dept. of Solid State Electronics, Huazhong Univ. of Sci. and Tech.
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HU Z.
Dept. of Solid State Electronics, Huazhong University of Sci. and Tech.
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YANG X.
Dept. of Solid State Electronics, Huazhong University of Sci. and Tech.
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LING G.
Dept. of Solid State Electronics, Huazhong University of Sci. and Tech.
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Hu Z.
Dept. Of Electronic Sci And Tech Huazhong University Of Sci. And Tech.
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Xu Y.
Dept. Of Solid State Electronics Huazhong University Of Sci. And Tech.
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YANG X.
Dept. of Electronic Sci and Tech, Huazhong University of Sci. and Tech.
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