Grain Boundary Structure of c-BN Thin Film Synthesized by PVD Method
スポンサーリンク
概要
著者
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Ikuhara Yuichi
Material Characterization Division Research And Development Laboratory Japan Fine Ceramics Center
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ZHOU Wei-Lie
Material Characterization Division, Research and Development Laboratory, Japan Fine Ceramics Center
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SUZUKI Tetsuya
Material Development Division, Toshiba Tungaloy Co., Ltd.
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Zhou Wei-lie
Material Characterization Division Research And Development Laboratory Japan Fine Ceramics Center
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Suzuki Tetsuya
Material Development Division Toshiba Tungaloy Co. Ltd.
関連論文
- A new method for preparing plan-view TEM specimen of multilayered films using focused ion beam
- Grain Boundary Structure of c-BN Thin Film Synthesized by PVD Method