High-Sensitivity Total Reflection X-Ray Fluorescence Spectroscopy of Silicon Wafers Using Synchrotron Radiation
スポンサーリンク
概要
- 論文の詳細を見る
- 1995-07-10
著者
-
Miyazaki Kunihiro
Integrated Circuit Advanced Process Engineering Department Toshiba Corporation
-
Brennan Sean
Stanford Synchrotron Radiation Laboratory Stanford Linear Accelerator Center
-
Fischer-colbrie Alice
Hewlett-packard Laboratories Hewlett-packard Company
-
LADERMAN Stephen
Hewlett-Packard Laboratories, Hewlett-Packard Company
-
SHIMAZAKI Ayako
Integrated Circuit Advanced Process Engineering Department, Toshiba Corporation
-
TAKAKURA Noritaka
Stanford Synchrotron Radiation Laboratory, Stanford Linear Accelerator Center
-
PIANETTA Piero
Stanford Synchrotron Radiation Laboratory, Stanford Linear Accelerator Center
-
KORTRIGHT Jeffrey
Center for X-ray Optics, Lawrence Berkeley Laboratory, University of California
-
Pianetta Piero
Stanford Synchrotron Radiation Laboratory Stanford Linear Accelerator Center
-
Shimazaki Ayako
Integrated Circuit Advanced Process Engineering Department Toshiba Corporation
-
Laderman Stephen
Hewlett-packard Laboratories Hewlett-packard Company
-
Takakura Noritaka
Stanford Synchrotron Radiation Laboratory Stanford Linear Accelerator Center
-
Kortright Jeffrey
Center For X-ray Optics Lawrence Berkeley Laboratory University Of California