Fabrication of a Linear Motion Microsystem on a Si Wafer

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概要

• 論文の詳細を見る
• 1996-06-30

著者

• Furukawa Yuji

  Faculty Of Eng. Tokyo Metropolitan University

• Moronuki Nobuyuki

  Faculty Of Engineering Tokyo Metropolitan University

• Furukawa Yuji

  Faculty Of Engineering Tokyo Metropolitan University

• MIKAMI Yasuomi

  Ricoh Company, Ltd.

• Mikami Yasuomi

  Ricoh Company Ltd.

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• Dynamic Stiffness of Machine Tool Feed Driving System : 2nd Report, Experimental Evaluation on the Damping Capacity of Slideway
• Dynamic Stiffness of Machine Tool Feed Driving System : 1st Report, Theoretical Analysis on the Damping Capacity of Slideway
• Generation and Growing Up Process of Self-Excited Chatter Vibration in Grinding
• Fabrication of a Linear Motion Microsystem on a Si Wafer

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