A New Processing Technique of GaAs Single Crystals and Its Mechanism

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概要

• 論文の詳細を見る
• 1996-03-31

著者

• Kasai T

  Faculty Of Engineering Saitama University

• KASAI Toshio

  Faculty of Engineering, Saitama University

• Karaki-doy Toshiroh

  Faculty Of Engineering Saitama University

• Nakagawa T

  Matsushita Electric Ind. Co. Ltd. Osaka

• KAGEYAMA Toshifumi

  Faculty of Engineering, Kanto Gakuin University

• NAKAGAWA Takeo

  Inst. of Industrial Science, University of Tokyo

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• Mirror Surface Grinding of ZrO_2 by Metal Resin Bonded Wheel with ELID
• Cross-correlation TOF Method by Pseudorandom Pulse Discharge
• A New Processing Technique of GaAs Single Crystals and Its Mechanism
• High Grade Precision Polishing Technique by a New Polishing Machine for Chalcone Crystals

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