Calibration Method of Optical System Roughness Error for the Random Micro-Roughness Measuring Apparatus
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概要
- 論文の詳細を見る
- 1995-03-31
著者
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Takaya Yasuhiro
Osaka University Department Of Mechanical Engineering For Industrial Machinery And Systems Faculty O
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Hayashi Kazushi
Tokyo Seimitsu Co. Ltd.
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MIYOSHI Takashi
Osaka University, Department of Mechanical Engineering for Industrial Machinery and Systems Faculty
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ARAI Masatoshi
TOKYO SEIMITSU CO., LTD.
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SETAKA Masafumi
TOKYO SEIMITSU CO., LTD.
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Miyoshi Takashi
Osaka University Department Of Mechanical Engineering For Industrial Machinery And Systems Faculty O
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Setaka Masafumi
Tokyo Seimitsu Co. Ltd.
関連論文
- Calibration Method of Optical System Roughness Error for the Random Micro-Roughness Measuring Apparatus
- Dynamic Simulation for Laser Trapping on Designed Micro-particles