二酸化チタンコーティング真空壁の光触媒脱ガス試験

概要

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We studied on characteristics of the degassing of a titaniumdioxide-coated vacuum wall induced by the photon-assist-ed catalysis. The coating was performed on a 304 stainless steel wall using hydrolysis reaction of Ti [OCH (CH3) 2] 4. A black lamp which emit only ultra violet light was employed as a photon source. During the irradiation desorption of water and hydrogen molecules is enhanced. The outgassing rate is reduced to the order of 10-7 Pa m3m-2s-1.
日本真空協会の論文
1998-03-20