Elemental Relative Sensitivities in Sputtered Neutral Mass Spectrometry Using Electron-beam-excited Plasma

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概要

• 論文の詳細を見る
• 日本真空協会の論文
• 1995-12-20

著者

• Bradley J

  The Institute Of Physical And Chemical Research (riken)

• BRADLEY James

  The Institute of Physical and Chemical Research, (RIKEN)

• KATO Shigeki

  Accelerator Div., Nat. lab. for High Energy physics

• Bradley James

  The Institute Of Physical And Chemical Research (riken)

• Kato Shigeki

  Accelerator Div. Nat. Lab. For High Energy Physics

関連論文

• Elemental Relative Sensitivities in Sputtered Neutral Mass Spectrometry Using Electron-beam-excited Plasma
• Plasma-Sheath Boundary in Plasmas Containing Thermal and Beam Electrons
• Plasma Pre-Sheath in Low Pressure Discharges Containing Beam Electrons of Finite Temperature

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