スポンサーリンク
Networked MEMS Technology Group, National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan | 論文
- High Quality Factor Silicon Cantilever Transduced by Piezoelectric Lead Zirconate Titanate Film for Mass Sensing Applications
- Energy Dissipation Mechanisms in Lead Zirconate Titanate Thin Film Transduced Micro Cantilevers