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National Institute Of Advanced Industrial Science And Technology Integrated Solid-state Electra Mech | 論文
- Preparation and Application of Lead Zirconate Titanate (PZT) Films Deposited by Hybrid Process : Sol-Gel Method and Laser Ablation
- Design and Fabrication of 1D and 2D Micro Scanners Actuated by Double Layered Lead Zirconate Titanate (PZT) Bimorph Beams