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Mechanical Engineering Laboratory, Agency of Industrial Science and Technology, Ministry | 論文
- X-Ray Diffraction and Scanning Electron Microscopy Observation of Lead Zirconate Titanate Thick Film Formed by Gas Deposition Method
- Deposition and Patterning Technique for Realization of Pb(Zr_, Ti_)O_3 Thick Film Micro Actuator
- Application of Gas Jet Deposition Method to Piezoelectric Thick Film Miniature Actuator