スポンサーリンク
Japan Science and Technology Agency (JST), Core Research Evolutional Science and Technology (CREST), Chiyoda, Tokyo 102-0075, Japan | 論文
- Resist pattern inspection using fluorescent dye-doped polystyrene thin films in reactive-monolayer-assisted thermal nanoimprint lithography (Special issue: Microprocesses and nanotechnology)
- Fluorescent Microscopy Proving Resin Adhesion to a Fluorinated Mold Surface Suppressed by Pentafluoropropane in Step-and-Repeat Ultraviolet Nanoimprinting