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F-tech Corporation | 論文
- Effect of AlN Film Thickness and Top Electrode Materials on Characteristics of Thin-Film Bulk Acoustic-Wave Resonator Devices
- Performance Characterization of Thin AIN Films deposited on Mo Electrode for Thin-Film Bulk Acoustic-Wave Resonators
- Influence of Piezoelectric Film and Electrode Materials on Film Bulk Acoustic-Wave Resonator Characteristics
- Performance Characterization of Thin AlN Films deposited on Mo Electrode for Thin-Film Bulk Acoustic-Wave Resonators
- Effect of AlN Film Thickness and Top Electrode Materials on Characteristics of Thin-Film Bulk Acoustic-Wave Resonator Devices
- Influence of Piezoelectric Film and Electrode Materials on Film Bulk Acoustic-Wave Resonator Characteristics