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Electronic Devices Company, Ricoh Co., Ltd., 13-1 Himemuro-cho, Ikeda, Osaka 563-8501, Japan | 論文
- Antistatic Technique for Suppressing Charging in Focused Ion Beam Systems Using Microprobing and Ion-Beam-Assisted Deposition
- Charge Neutralization Using Focused 500 eV Electron Beam in Focused Ion Beam System