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ELTRAN project, Canon Inc. | 論文
- Defect Engineering in Epitaxial Layers over Porous Silicon for ELTRAN^【○!R】 SOI Wafers
- Extremely Low Si Etching (
- Current Progress in Epitaxial Layer Transfer (ELTRAN^[○!R]) (Special Issue on SOI Devices and Their Process Technologies)
- Water Jet Splitting of Thin Porous Si for ELTRAN^【○!R】