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Division of Chemical Engineering, Korea Institute of Science and Technology | 論文
- 溶融炭酸塩型燃料電池特性に及ぼすNi-Crアノードの構造変化の影響
- A Study on the Relation between Film Quality and Deposition Rate for Amorphous Silicon Films Grown by Electron Cyclotron Resonance Plasma Chemical Vapor Deposition Using H_2/SiH_4