スポンサーリンク
Department of Electronics Information and Communication Engineering, Osaka Institute of Technology, 5-16-1 Omiya, Asahi-ku, Osaka 535-8585, Japan | 論文
- Simulation of Fogging Electrons in Electron Beam Lithography
- Extreme Ultraviolet Lithography Simulation by Tracing Photoelectron Trajectories in Resist
- Electrical Conductivity of Polymer Composites Filled with Metal