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Department of Electrical and Computer Science, Graduation School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan | 論文

• Complementary Metal–Oxide–Semiconductor Ion-Sensitive Field-Effect Transistor Sensor Array with Silicon Nitride Film Formed by Catalytic Chemical Vapor Deposition as an Ion-Sensitive Membrane

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