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Central Research Laboratory, Hitachi Ltd., Kokubunji, TOKYO 185 JAPAN | 論文
- Fabrication of Deep Sub-μm Narrow-Channel Si-MOSFET's with Twofold-Gate Structures : Microfabrication and Physics
- Fabrication of Deep Sub-$\mu$m Narrow-Channe1 Si-MOSFET's with Twofold-Gate Structures