Hayashi Shinji | Department of Electrical and Electronics Engineering, Kobe University, Kobe 657-8501, Japan
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- Department of Electrical and Electronics Engineering, Kobe University, Kobe 657-8501, Japanの論文著者
Department of Electrical and Electronics Engineering, Kobe University, Kobe 657-8501, Japan | 論文
- Spatial Structure of Waves and Plasma Uniformity in Planar Microwave Discharges
- Experimental and Simulation Studies of Gas Phase Reaction in Planar Microwave Plasma