MATSUI Yutaka | ULVAC JAPAN Ltd., Res. and Dev. Division
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概要
ULVAC JAPAN Ltd., Res. and Dev. Division | 論文
- Pumping Characteristics of Bakeable Cryopumps without Charcoal in the Range of Extremely High Vacuum
- Attainment of Extremely High Vacuum Using Copper Ultrafine Powder as Cryosorbent in Bakeable-Type Cryopump