LING C. | Microelectronics Laboratory, Department of Electrical Engineering, National University of Singapore

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• 同名の論文著者
• Microelectronics Laboratory, Department of Electrical Engineering, National University of Singaporeの論文著者

Microelectronics Laboratory, Department of Electrical Engineering, National University of Singapore | 論文

• Silicon Nitride Films Prepared by Plasma-Enhanced Chemical Vapour Deposition (PECVD) of SiH_4/NH_3/N_2 Mixtures : Some Physical Properties

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