Miyauchi Yasushi | Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-koigakubo, Kokubunji-shi, Tokyo 185-8601, Japan
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- 同名の論文著者
- Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-koigakubo, Kokubunji-shi, Tokyo 185-8601, Japanの論文著者
Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-koigakubo, Kokubunji-shi, Tokyo 185-8601, Japan | 論文
- Preparatory Study for the Matrix-Pattern Imaging, EB System
- XY-Stage Driving Electron-Beam Mastering with Nanometer-Accuracy Positioning for High-Density Optical Disk